Doubly clamped single-walled carbon nanotube resonators operating in MHz frequencies

We report fabrication and experimental characterization of doubly clamped metallic single-walled carbon nanotube (SWNT) resonators. Fabricated resonators are based on CVD grown metallic nanotubes clamped and contacted on both sides and suspended on top of a poly-Si actuation pad. We measured devices with 2 to 3 μm length with resonance frequencies ranging from 11 to 69 MHz. The resonance is observed in atmospheric pressure when peak to peak actuation voltages are around 2 V. We also measured reduction in DC-conductance of suspended SWNTs by applying actuation voltage. The advantages of using poly-Si actuation pad are that devices could be modulated individually through patterned poly-Si pads with minimum parasitic capacitance from the pad to SWNT contacts (high frequency operation is possible) and compatibility of poly-Si with subsequent high temperature growth of SWNTs.