Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method

A new patterning method has been developed to fabricate the patterned organic light emitting devices (OLEDs) with pixels of 500 μm×300 μm on the flexible PET substrates. The patterns of the pixel array were defined in crossed-strip style with ITO anode patterned using a combination of the roller-type imprinting lithography and photolithography (CRIP), followed by wet chemical etching. Compared with the conventional imprint lithography or photolithography, CRIP using the hybrid mold has the advantages of better uniformity, less force, less time-consuming, lower cost and higher aspect ratio.