DocumentCode
1860346
Title
Silver nanoparticle structures realized by digital surface micromachining
Author
Lam, E.W. ; Li, H. ; Schmidt, M.A.
Author_Institution
Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2009
fDate
21-25 June 2009
Firstpage
1698
Lastpage
1701
Abstract
We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration, silver cantilevers were fabricated using this process and subsequently characterized to determine the silver film´s mechanical properties.
Keywords
Young´s modulus; cantilevers; micromachining; micromechanical devices; nanoparticles; nanopatterning; silver; Ag; Young´s moduli; commercial silver nanoparticle inks; digital fabrication; digital surface micromachining; mechanical properties; nonlithographic patterning; silver cantilevers; silver nanoparticle structures; Fabrication; Ink; Mechanical factors; Microcontrollers; Micromachining; Micromechanical devices; Nanostructures; Printing; Silver; Temperature; Inkjet; MEMS; Nanoparticles; Printing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285759
Filename
5285759
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