• DocumentCode
    1860346
  • Title

    Silver nanoparticle structures realized by digital surface micromachining

  • Author

    Lam, E.W. ; Li, H. ; Schmidt, M.A.

  • Author_Institution
    Microsyst. Technol. Labs., Massachusetts Inst. of Technol., Cambridge, MA, USA
  • fYear
    2009
  • fDate
    21-25 June 2009
  • Firstpage
    1698
  • Lastpage
    1701
  • Abstract
    We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration, silver cantilevers were fabricated using this process and subsequently characterized to determine the silver film´s mechanical properties.
  • Keywords
    Young´s modulus; cantilevers; micromachining; micromechanical devices; nanoparticles; nanopatterning; silver; Ag; Young´s moduli; commercial silver nanoparticle inks; digital fabrication; digital surface micromachining; mechanical properties; nonlithographic patterning; silver cantilevers; silver nanoparticle structures; Fabrication; Ink; Mechanical factors; Microcontrollers; Micromachining; Micromechanical devices; Nanostructures; Printing; Silver; Temperature; Inkjet; MEMS; Nanoparticles; Printing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4244-4190-7
  • Electronic_ISBN
    978-1-4244-4193-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2009.5285759
  • Filename
    5285759