Title :
Electrical conduction and molecular orientation of polyimide by vapor deposition polymerization
Author :
Iida, Kazuo ; Chen, Yong He ; Nakamura, Shuhei ; Sawa, Goro
Author_Institution :
Dept. of Electron., Mie Univ., Tsu, Japan
Abstract :
The purpose of this paper is to elucidate the relationship between the molecular orientation and the electrical conduction in polyimide (PI) films. We will propose a method for quantitative evaluation of the molecular orientation by comparing the FTIR reflection-absorption spectrum (RAS) with the transmission spectrum of unoriented PI such as in KBr pellets, and apply it to PI on an evaporated Au substrate. The molecular orientation of PI was investigated by RAS, and on the basis of this result the conduction characteristics are discussed
Keywords :
molecular orientation; FTIR reflection-absorption spectrum; KBr pellets; electrical conduction; evaporated Au substrate; molecular orientation; polyimide films; transmission spectrum; vapor deposition polymerization; Chemical vapor deposition; Heating; Helium; Mechanical factors; Polyimides; Polymers; Solid state circuits; Temperature dependence; Thermal stability; X-ray diffraction;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1994., IEEE 1994 Annual Report., Conference on
Conference_Location :
Arlington, TX
Print_ISBN :
0-7803-1950-8
DOI :
10.1109/CEIDP.1994.592056
