DocumentCode :
1860686
Title :
Deposition of contaminants on silicon media during wet processing
Author :
Johnson, M.W. ; Gildor, A.
Author_Institution :
Entegris, Inc., Chaska, MN, USA
fYear :
2011
fDate :
19-24 June 2011
Abstract :
The introduction of contaminants on silicon media during processing can reduce the efficiency of photovoltaic (PV) cells and shorten their lifetime. One of the sources of contamination is process baths where media is dipped into water and/or chemicals for etching or cleaning. The sources of bath contaminants are numerous. They can arise from insufficiently pure chemicals or water. The tanks, silicon carriers and handling equipment may be constructed from industrial grade materials that desorb impurities thereby contaminating baths. Alternatively, the impurities could be extracted from common plastics used in industrial grade plumbing components or chemical containers. In this paper, we examine how a contaminated process bath may potentially deposit impurities on silicon media. Upon withdrawing a silicon wafer from a bath, a thin layer of liquid is left on the surface of the silicon. Any contaminants in the liquid layer will be deposited on the silicon when the liquid evaporates. This information will show that the biggest factor affecting deposition of impurities is the concentration of impurities in the bath. Other factors such as removal speed of the wafers from the bath and properties of the liquid including surface tension, density and viscosity are less influential.
Keywords :
desorption; elemental semiconductors; etching; liquid films; liquid phase deposition; silicon; solar cells; surface cleaning; surface contamination; surface tension; viscosity; wetting; Si; bath contaminants source; chemical containers; equipment handling; etching; impurities concentration; impurities deposition; impurities desorption; industrial grade materials; industrial grade plumbing components; liquid evaporation; liquid thin layer; photovoltaic cells; plastic extraction; process baths; silicon carriers; silicon media contaminants; surface density; surface tension; surface viscosity; wet processing; Chemicals; Films; Impurities; Media; Silicon; Surface contamination;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location :
Seattle, WA
ISSN :
0160-8371
Print_ISBN :
978-1-4244-9966-3
Type :
conf
DOI :
10.1109/PVSC.2011.6186139
Filename :
6186139
Link To Document :
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