Title :
A high sensitivity single-walled carbon-nanotube-array-based strain sensor for weighing
Author :
Yang, X. ; Zhou, Z.Y. ; Zheng, F.Z. ; Zhang, M. ; Zhang, J. ; Yao, Y.G.
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
Abstract :
A single-walled carbon-nanotube-array-based (SWCNT) strain sensor was proposed and its fabrication technique was presented, which afforded more simple process than individual SWCNT-based sensor. A novel selective treatment of strain-based electrical breakdown was utilized to leave the SGS-SWCNTs with high gauge factor in the array. The SWCNT-array strain sensor were used for weighing experiment and the results showed that the sensor´s output was basically linear. It also showed that the sensor had relatively higher sensitivity (GF ap 20) and lower power consumption (tens of nanoWatts) than metal strain-gauge, which had potential applications in high sensitivity strain, weighing or pressure sensors.
Keywords :
carbon nanotubes; electric breakdown; gauges; pressure measurement; pressure sensors; strain measurement; strain sensors; C; electrical breakdown; gauge factor; lower power consumption; pressure sensors; single walled carbon nanotube array; strain sensor; weighing experiment; Capacitive sensors; Carbon nanotubes; Chemical sensors; Conductive adhesives; Electrodes; Fabrication; Instruments; Polymer films; Sensor arrays; Silicon; CARBON NANOTUBE ARRAY; PIEZORESISTANCE; WEIGHING SENSOR;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285798
