Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membrane

Author

Mack, B. ; Kratt, K. ; Sturmer, Michael ; Wallrabe, U.

Author_Institution

Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany

fYear

2009

fDate

21-25 June 2009

Firstpage

1397

Lastpage

1400

Abstract

This work describes the fabrication and characterization of an electromagnetic micro generator array for energy harvesting purposes. The array consists of a magnetic polydimethylsiloxane (PDMS) membrane with 3x3 magnets which is aligned over a PCB with 3x3 coils. Different coil cores are tested and compared. The parameter for comparison is the voltage induced in the coil array by the vibrating membrane. The maximum measured voltage is 1.2 mV when exciting the converter array with an acceleration of 60 m/s².

Keywords

electric generators; electromagnetic devices; energy harvesting; membranes; micromechanical devices; polymers; 3D microcoil; coil array; coil core; converter array; electromagnetic microgenerator array; energy harvesting; magnetic PDMS membrane; magnetic polydimethylsiloxane membrane; vibrating membrane; Acceleration; Accelerometers; Biomembranes; Character generation; Coils; Fabrication; Magnetic cores; Magnets; Testing; Voltage measurement; Electromagnetic; converter; energy harvesting; vibration;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285833

Filename

5285833