DocumentCode
1862604
Title
Resistive switching in metal-oxide-metal devices: Fundamental understanding in relation to material characterization
Author
Vallee, C. ; Mannequin, C. ; Gonon, P. ; Latu-Romain, L. ; Grampeix, H. ; Jousseaume, V.
Author_Institution
Lab. des Technol. de la Microelectron., UJF, Grenoble, France
fYear
2013
fDate
Sept. 30 2013-Oct. 3 2013
Firstpage
151
Lastpage
158
Abstract
This emerging technology tutorial is focused on Resistive non-volatile memories based on a MIM structure with a high k dielectric such as HfO2.
Keywords
MIM devices; hafnium compounds; high-k dielectric thin films; random-access storage; HfO2; MIM structure; high k dielectric; material characterization; metal-oxide-metal devices; resistie switching; resistive nonvolatile memories; Dielectrics; Electrodes; Gold; Hafnium compounds; Plasmas; Tin; HfO2 ; MIM; RRAM; non-volatile memory;
fLanguage
English
Publisher
ieee
Conference_Titel
Bipolar/BiCMOS Circuits and Technology Meeting (BCTM), 2013 IEEE
Conference_Location
Bordeaux
ISSN
1088-9299
Print_ISBN
978-1-4799-0126-5
Type
conf
DOI
10.1109/BCTM.2013.6798164
Filename
6798164
Link To Document