Pitch-variable MEMS grating with 4-level blazed surface

Author

Wang, Y. ; Kanamori, Y. ; Hane, K.

Author_Institution

Dept. of Nanomech., Tohoku Univ., Sendai, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1345

Lastpage

1348

Abstract

Pitch-variable gratings with blazed surface profiles are designed and fabricated by combining silicon-on-insulator (SOI) technology with microelectronicmechanical system (MEMS) technology. A two-mask process is employed to realize 4-level blazed surface profile, and electrostatic combdrive microactuators are used to stretch the freestanding grating beams. The experimental results indicate the fabricated 4-level blazed gratings could realize large tuning range and achieve high diffraction efficiency.

Keywords

masks; micromechanical devices; silicon-on-insulator; 4-level blazed grating; 4-level blazed surface profile; electrostatic combdrive microactuator; freestanding grating beam; microelectronicmechanical system; pitch-variable MEMS grating; silicon-on-insulator technology; two-mask process; Actuators; Diffraction gratings; Micromechanical devices; Optical diffraction; Optical films; Optical surface waves; Reflectivity; Silicon on insulator technology; Spectroscopy; Wet etching; Tunable blazed grating; fast atom beam etching; silicon-on-insulator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285850

Filename

5285850