DocumentCode
1862987
Title
Long mean free path kinetic theory using scattering rates
Author
Hitchon, W.N.G. ; Parker, G.J.
Author_Institution
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
fYear
1997
fDate
19-22 May 1997
Firstpage
188
Abstract
Summary form only given, as follows. Numerical computation of the scattering rates of particles can provide information equivalent to the full distribution function, but can be much less computationally expensive to obtain. The calculation involves iterating a (discretized) integral equation. The difficulty lies in finding an accurate, realistic and sufficiently compact form for the ´kernel´ in the integral equation. Different representations of the kernel will be discussed. Applications have been made to long-mean-free path plasma chemistry, transport of sputtered particles and kinetics of injected ions inside a crystal. These will be outlined with emphasis on neutral transport in a plasma environment.
Keywords
integral equations; plasma kinetic theory; plasma transport processes; crystal; discretized integral equation; distribution function; injected ions; integral equation; kernel; long mean free path kinetic theory; long-mean-free path plasma chemistry; neutral transport; numerical computation; particle scattering rates; plasma environment; sputtered particles; Computer aided manufacturing; Distributed computing; Integral equations; Kinetic theory; Particle scattering; Physics computing; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma transport processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.604775
Filename
604775
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