MEMS tunable Fabry-Perot Filters with thick, two sided optical coatings

Author

Stupar, P.A. ; Borwick, R.L., III ; DeNatale, J.F. ; Kobrin, P.H. ; Gunning, W.J.

Author_Institution

Teledyne Sci. & Imaging, Thousand Oaks, CA, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

1357

Lastpage

1360

Abstract

A MEMS based tunable Fabry-Perot filter array has been designed and fabricated to provide spectral information in the long-wave infrared (LWIR) band, while remaining transparent in the mid-wave infrared (MWIR) band. Due to the stringent requirements on the optical design, relatively thick optical reflector and anti-reflector coatings are needed. A two-sided, SOI device layer transfer process has been developed to fabricate the thick coating layers and maintain a balanced stress state on the thin moveable membrane of the filter. Fabricated parts have less than 11 nm of deflection across a 200 mum filter. Measured filters show a <120 nm bandwidth peak in the LWIR that is tunable from 11.8 mum to 7.9 mum.

Keywords

antireflection coatings; infrared imaging; micro-optics; micromechanical devices; optical arrays; optical filters; silicon-on-insulator; MEMS tunable Fabry-Perot filter array; SOI device; antireflector coating; long wave infrared band; optical coatings; optical reflector; wavelength 11.8 mum to 7.9 mum; Biomembranes; Coatings; Fabry-Perot; Information filtering; Information filters; Infrared spectra; Micromechanical devices; Optical design; Optical filters; Stress; Fabry-Perot; MEMS; imaging; spectral imaging; tunable filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285853

Filename

5285853