Title :
Ellipsoidal micro lens fabricated by depositing parylene directly on liquid
Author :
Miyamoto, R. ; Binh-Khiem, N. ; Iwase, E. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Grad. Sch. of Inf. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
Abstract :
We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 mul in volume on hydrophilic elliptical domains with 5.00 mm major diameter and 2.50 mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.
Keywords :
microlenses; optical fabrication; optical polymers; ellipsoidal microlens; hydrophilic elliptical domains; parylene on liquid deposition; size 2.50 mm; size 5.00 mm; Lenses; Ellipsoidal lens; Liquid lens; Parylene; chemical vapor deposition;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285855
