Title :
CMOS-MEMS knife-edge optical spot profiling system
Author :
Chiu, Y. ; Chang, T.L. ; Pan, C.H.
Author_Institution :
Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
The knife edge technique is commonly used to measure tightly focused optical spot profiles with sub-wavelength or nano-meter resolutions. In this paper, we demonstrate a micro scanning knife edge system by using the CMOS-MEMS technology. The scanning actuator, the photodetector, and the signal conditioning circuit, are all integrated and fabricated in the same device by the TSMC 0.35 mum 2P4M technology. The mechanical and electrical properties of various components in the system were characterized. Measurement of focused optical spot profiles at different wavelength and numerical apertures were successfully demonstrated.
Keywords :
CMOS integrated circuits; micro-optics; photodetectors; 2P4M technology; CMOS-MEMS technology; electrical properties; knife edge technique; mechanical properties; micro scanning knife edge system; nano-meter resolutions; optical spot profiling; photodetector; scanning actuator; signal conditioning circuit; size 0.35 mum; sub-wavelength meter resolutions; Actuators; Apertures; CMOS technology; Integrated circuit measurements; Integrated circuit technology; Mechanical factors; Photodetectors; Signal resolution; Wavelength measurement; CMOS MEMS; comb drive actuator; knife edge; photo detector;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285856
