CMOS-MEMS knife-edge optical spot profiling system

Author

Chiu, Y. ; Chang, T.L. ; Pan, C.H.

Author_Institution

Dept. of Electr. & Control Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

fYear

2009

fDate

21-25 June 2009

Firstpage

1369

Lastpage

1372

Abstract

The knife edge technique is commonly used to measure tightly focused optical spot profiles with sub-wavelength or nano-meter resolutions. In this paper, we demonstrate a micro scanning knife edge system by using the CMOS-MEMS technology. The scanning actuator, the photodetector, and the signal conditioning circuit, are all integrated and fabricated in the same device by the TSMC 0.35 mum 2P4M technology. The mechanical and electrical properties of various components in the system were characterized. Measurement of focused optical spot profiles at different wavelength and numerical apertures were successfully demonstrated.

Keywords

CMOS integrated circuits; micro-optics; photodetectors; 2P4M technology; CMOS-MEMS technology; electrical properties; knife edge technique; mechanical properties; micro scanning knife edge system; nano-meter resolutions; optical spot profiling; photodetector; scanning actuator; signal conditioning circuit; size 0.35 mum; sub-wavelength meter resolutions; Actuators; Apertures; CMOS technology; Integrated circuit measurements; Integrated circuit technology; Mechanical factors; Photodetectors; Signal resolution; Wavelength measurement; CMOS MEMS; comb drive actuator; knife edge; photo detector;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285856

Filename

5285856