Title :
Amorphous-crystalline silicon heterojunction solar cells formed by the DC saddle field PECVD system: A deposition parameter optimization
Author :
Leong, Keith R. ; Gougam, Adel B. ; Bahardoust, Barzin ; Kwong, Wing Yin ; Kosteski, Tome ; Yeghikyan, Davit ; Zukotynski, Stefan ; Kherani, Nazir P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
The DC Saddle Field PECVD system was used to deposit hydrogenated amorphous silicon (a-Si:H) layers for high efficiency amorphous-crystalline silicon heterojunction (ACSHJ) solar cells. The plasma controlling parameters; including the chamber pressure, gas phase dopant concentration for the p-type a-Si:H (a-Si:H(p+)) emitter, and substrate temperature were varied. The substrate temperature was found to be a critical parameter for the deposition of intrinsic a-Si:H as epitaxial formation can occur with just a temperature increase of 10°C. The processing capabilities have been developed to construct ACSHJ solar cells with 15.5% conversion efficiency for a 4.2 cm2 area.
Keywords :
amorphous semiconductors; hydrogen; plasma CVD; silicon; solar cells; DC saddle field PECVD system; Si:H; amorphous-crystalline silicon heterojunction solar cells; chamber pressure; conversion efficiency; deposition parameter optimization; gas phase dopant concentration; plasma controlling parameters; substrate temperature; Anodes; Cathodes; Epitaxial growth; Metals; Photovoltaic cells; Substrates; Temperature measurement;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
978-1-4244-9966-3
DOI :
10.1109/PVSC.2011.6186238
