The magnetic calibration of arbitrarily shaped Hall sensors in the absence of magnetic fields

This paper presents a method to calibrate arbitrarily shaped planar Hall plates without the need for applying a magnetic field. Using the method of conformal mapping, it is shown that magnetic sensitivity parameters can be extracted from six independent resistance values measurable in the absence of a perpendicular magnetic field B_perp. Remarkably, no prior knowledge of the device geometry is required. As a consequence, numerical simulations of Hall plate sensitivities can be performed by solving electrical conduction problems without magnetic effects, and using the appropriate value of the Hall mobility mu_H. Experimental data measured with CMOS sensors corroborate the theoretical findings.