DocumentCode :
1863284
Title :
Adaptive Robust Precision Control of Piezoelectric Positioning Stages
Author :
Jinghua Zhong ; Bin Yao
fYear :
2005
fDate :
2005
Firstpage :
189
Lastpage :
194
Keywords :
Adaptive control; Atomic force microscopy; Bandwidth; Error correction; Frequency; Hysteresis; Piezoelectric actuators; Programmable control; Relays; Robust control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
Type :
conf
DOI :
10.1109/AIM.2005.1500988
Filename :
1500988
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1863284
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