DocumentCode :
1863542
Title :
Self-Built Multilayer Aligner for Imprint with Finite Element Method Simulation
Author :
Cheng-Tang Pan ; Chi-Cheng Cheng ; Chin-Yin Chen
fYear :
2005
fDate :
2005
Firstpage :
249
Lastpage :
254
Keywords :
Application software; Displays; Finite element methods; Lithography; Nonhomogeneous media; Organic materials; Resists; Sputter etching; Sputtering; Thin film transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
Type :
conf
DOI :
10.1109/AIM.2005.1500998
Filename :
1500998
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1863542
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