Title :
High-performance magnetic active-valve micropump
Author :
Shen, M. ; Gijs, M.A.M.
Author_Institution :
Lab. of Microsyst., Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland
Abstract :
We report on a high-efficiency and self-priming active-valve micropump that is magnetically actuated by arc-shaped NdFeB permanent magnets mounted on the rotation axis of a DC minimotor. For the realisation, we use affordable powder blasting microfabrication and polydimethyl-siloxane (PDMS) molding technologies. A flow rate of 1.5 mL/min and 60 mbar backpressure are obtained at the actuation resonance frequency of around 10 Hz. This performance is much better than reported so far for such type of micropump.
Keywords :
boron alloys; iron alloys; microfabrication; microfluidics; micropumps; neodymium alloys; permanent magnets; DC minimotor; NdFeB permanent magnets; actuation resonance frequency; arc-shaped magnet; magnetic active-valve; micropump; polydimethyl-siloxane molding; powder blasting microfabrication; Actuators; Biochemical analysis; Biomembranes; Energy consumption; Glass; Magnetic analysis; Magnetic resonance; Magnetic separation; Micropumps; Permanent magnets; Reciprocating micropump; active-valve; arc-shaped magnet; magnetic actuator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285881