Title :
A planar cascading architecture for a ceramic Knudsen micropump
Author :
Gupta, Naveen K. ; Gianchandani, Yogesh B.
Author_Institution :
Dept. of Mech. Eng., Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
This paper describes a 9-stage Knudsen pump with planar architecture that uses nanoporous ceramic for thermal transpiration. While operating at 55 K above room temperature, the pump provides a maximum pressure head exceeding 12 kPa at a sealed outlet, or a gas flow rate of ap3.8 muL/min. against a pressure head of 160 Pa. Experiments also demonstrate the capability of the pump to steer water droplets at speeds exceeding 1200 mum/s through a 250 mum fluorinated ethylene propylene capillary. The packaged volume for the 9-stage pump discussed here is 25times25times7.25 mm3. These characteristics indicate that the pump is potentially useful in microfluidic systems intended for both gas and liquid phase chemical sensing.
Keywords :
Knudsen flow; capillarity; ceramics; chemical sensors; microfluidics; micropumps; microsensors; nanoporous materials; polymers; ceramic Knudsen micropump; fluorinated ethylene propylene capillary; gas flow; gas phase chemical sensing; liquid phase chemical sensing; microfluidic systems; nanoporous ceramics; planar cascading architecture; sealed outlet; steer water droplets; thermal transpiration; Ceramics; Chemicals; Fluid flow; Mechanical engineering; Microfluidics; Micropumps; Nanoporous materials; Packaging; Temperature; Thermal engineering; Knudsen pump; gas flow; liquid flow; nanoporous ceramic; thermal transpiration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285895