Title :
Optimal Control Based Active Force Sensing System for Micromanipulation
Author :
Winder, E. ; Yantao Shen ; Ning Xi ; Weihua Sheng ; Wejinya, Uchechukwu C. ; Pomeroy, C.A.
Keywords :
Atomic force microscopy; Bonding forces; Dynamic range; Electrostatics; Force control; Force measurement; Force sensors; Optimal control; Servomechanisms; Structural beams;
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
DOI :
10.1109/AIM.2005.1501024