Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometer

This paper reports the design, simulation and fabrication of a MEMS fluidic inertial sensor, which integrates three-axis gyroscope and dual-axis accelerometer so that the device can independently detect three components of angular rate and two components of linear acceleration. The gyroscope utilizes jet flow directly created from an integrated micro pump. This simplifies packaging process while maintaining good characteristics of the device. The device was fabricated by standard bulk MEMS technology. Fundamental experiments have been done, the performance of the micro jet-pump was evaluated and the sensitivity of accelerometer was characterized.