New polysilicon sensor and actuator technology for the development of a thermal platform

Author

Marty, B. ; Camps, T. ; Tasselli, J. ; Marty, A. ; Lagrange, D.

fYear

2009

fDate

21-25 June 2009

Firstpage

1186

Lastpage

1189

Abstract

This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40 mV/degC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating conditions. First encouraging results of temperature detection are presented.

Keywords

microactuators; microfluidics; microsensors; semiconductor diodes; silicon compounds; temperature control; temperature sensors; actuator technology; glass wafer; microfluidics operating condition; polysilicon diodes; polysilicon sensor; temperature detection; thermal control; thermal sensing; Actuators; CMOS technology; Diodes; Fabrication; Glass; Microfluidics; Temperature measurement; Temperature sensors; Thermal sensors; Voltage; Polysilicon diodes; glass wafers; thermal sensors and actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285915

Filename

5285915