Micro- and nanostructured magnetic field sensor for space applications

Author

Persson, A. ; Nguyen, H. ; Riddar, F. ; Thornell, G.

Author_Institution

Dept. of Eng. Sci., Uppsala Univ., Uppsala, Sweden

fYear

2009

fDate

21-25 June 2009

Firstpage

1190

Lastpage

1193

Abstract

Magnetometers are popular payloads on scientific space missions. Here, the design and fabrication process of a miniaturized magnetometer based on tunneling magnetoresistance is presented. The process is capable of making magnetic tunnel junctions in a wide size range, by employing both UV lithography and focused ion beam milling and deposition. Ga implantation in the ferromagnetic electrodes of the junction is studied in more detail. It was shown that Ga implantation may harm the magnetometer if the irradiation dose exceeds 10¹⁴ Ga+ cm^-2.

Keywords

aerospace instrumentation; ferromagnetic materials; focused ion beam technology; gallium; ion implantation; magnetic field measurement; magnetic sensors; magnetometers; microelectrodes; microsensors; milling; sputtered coatings; tunnelling magnetoresistance; ultraviolet lithography; Ga; UV lithography; ferromagnetic electrode implantation; focused ion beam deposition; focused ion beam milling; magnetic tunnel junction; microstructured magnetic field sensor; miniaturized magnetometer; nanostructured magnetic field sensor; scientific space missions; space applications; tunneling magnetoresistance; Fabrication; Ion beams; Lithography; Magnetic sensors; Magnetic tunneling; Magnetometers; Payloads; Process design; Space missions; Tunneling magnetoresistance; Ga implantation; Magnetometer; focused ion beam; magnetic tunnel junction; tunneling magnetoresistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285916

Filename

5285916