Title :
Magnetic torque driving 2D micro scanner with a non-resonant large scan angle
Author :
Makishi, W. ; Kawai, Y. ; Esashi, M.
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
In this paper, a non-resonant 2D optical scanner with extremely large optical scan angle has been reported. A mirror, which is supported with a double-gimbal structure, is inclined by a rotational magnetic torque. Two of four permanent magnets are mounted on the mirror and the gimbal, respectively. The scanning angle of two axis can be controlled independently using external electromagnets. A static drive with maximum optical scan-angle of 118 degree has been achieved.
Keywords :
optical scanners; 2D micro scanner; double-gimbal structure; magnetic torque driving; mirror; non-resonant 2D optical scanner; optical scan angle; permanent magnet; rotational magnetic torque; scanning angle; static drive; Atom optics; Bars; Coils; Electromagnets; Electrostatics; Magnetic devices; Magnetic fields; Mirrors; Permanent magnets; Torque; 2D scanner; Magnetic torque; large scan angle; magnet mounting mirror; non-resonant;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285920
