3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coils

Author

Badilita, V. ; Kratt, K. ; Burger, T. ; Korvink, J.G. ; Wallrabe, U.

Author_Institution

Dept. of Microsyst. Eng.-IMTEK, Univ. of Freiburg, Freiburg, Germany

fYear

2009

fDate

21-25 June 2009

Firstpage

1106

Lastpage

1109

Abstract

High-aspect-ratio 3D geometrically perfect solenoidal micro-coils are fabricated for the first time in a fully MEMS-integrated technology. Vertical micro-coils with up to 15 windings and diameters down to 100 mum have been wound using an automatic wirebonder around SU8 and PMMA cylindrical posts. Using this method we also fabricate Helmholtz micro-coils capable to generate magnetic fields of 1 mT, according to simulations. We demonstrate the potential to use large arrays of solenoidal micro-coils for energy harvesting applications by placing them in a sinusoidal magnetic field. The induced voltage is 1.4 mV at 300 kHz for a 7 windings micro-coil, in agreement with theoretical calculations.

Keywords

energy harvesting; magnetic fields; microfabrication; solenoids; Helmholtz microcoil; MEMS integrated microsolenoid; MEMS-integrated fabrication technology; PMMA cylindrical post; automatic wirebonder; energy harvesting application; frequency 300 kHz; magnetic field; voltage 1.4 mV; Coils; Fabrication; Laboratories; Magnetic fields; Manufacturing; Microactuators; Micromechanical devices; Resists; Substrates; X-ray lithography; 3D micro-coils; energy harvesting; wire-bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285923

Filename

5285923