DocumentCode
1864806
Title
RF MEMS: benefits & challenges of an evolving RF switch technology
Author
Goldsmith, C. ; Kleber, J. ; Pillans, B. ; Forehand, D. ; Malczewski, A. ; Frueh, P.
Author_Institution
Raytheon Co., TX, USA
fYear
2001
fDate
21-24 Oct. 2001
Firstpage
147
Lastpage
148
Abstract
RF MEMS technology is a new technology that is already finding niche applications in radar and communications systems. Its low power, high performance, and tunability enables potential cost, size, and/or weight improvements in several systems. Emphasis is no longer focused on RF performance, as that aspect is well established. Currently, efforts are underway to establish and improve the reliability of the devices. As with any maturing technology, there is much room for improvement. However, results to date show continuing improvement in lifetime and provide an argument that these devices will eventually have very long lifetimes (> 10/sup 11/ cycles).
Keywords
micromechanical devices; switches; RF MEMS technology; RF switch; Capacitors; Costs; Dielectric losses; Filters; Inductors; Micromachining; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2001. 23rd Annual Technical Digest
Conference_Location
Baltimore, MD, USA
ISSN
1064-7775
Print_ISBN
0-7803-6663-8
Type
conf
DOI
10.1109/GAAS.2001.964365
Filename
964365
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