• DocumentCode
    1864806
  • Title

    RF MEMS: benefits & challenges of an evolving RF switch technology

  • Author

    Goldsmith, C. ; Kleber, J. ; Pillans, B. ; Forehand, D. ; Malczewski, A. ; Frueh, P.

  • Author_Institution
    Raytheon Co., TX, USA
  • fYear
    2001
  • fDate
    21-24 Oct. 2001
  • Firstpage
    147
  • Lastpage
    148
  • Abstract
    RF MEMS technology is a new technology that is already finding niche applications in radar and communications systems. Its low power, high performance, and tunability enables potential cost, size, and/or weight improvements in several systems. Emphasis is no longer focused on RF performance, as that aspect is well established. Currently, efforts are underway to establish and improve the reliability of the devices. As with any maturing technology, there is much room for improvement. However, results to date show continuing improvement in lifetime and provide an argument that these devices will eventually have very long lifetimes (> 10/sup 11/ cycles).
  • Keywords
    micromechanical devices; switches; RF MEMS technology; RF switch; Capacitors; Costs; Dielectric losses; Filters; Inductors; Micromachining; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2001. 23rd Annual Technical Digest
  • Conference_Location
    Baltimore, MD, USA
  • ISSN
    1064-7775
  • Print_ISBN
    0-7803-6663-8
  • Type

    conf

  • DOI
    10.1109/GAAS.2001.964365
  • Filename
    964365