Title :
RF MEMS: benefits & challenges of an evolving RF switch technology
Author :
Goldsmith, C. ; Kleber, J. ; Pillans, B. ; Forehand, D. ; Malczewski, A. ; Frueh, P.
Author_Institution :
Raytheon Co., TX, USA
Abstract :
RF MEMS technology is a new technology that is already finding niche applications in radar and communications systems. Its low power, high performance, and tunability enables potential cost, size, and/or weight improvements in several systems. Emphasis is no longer focused on RF performance, as that aspect is well established. Currently, efforts are underway to establish and improve the reliability of the devices. As with any maturing technology, there is much room for improvement. However, results to date show continuing improvement in lifetime and provide an argument that these devices will eventually have very long lifetimes (> 10/sup 11/ cycles).
Keywords :
micromechanical devices; switches; RF MEMS technology; RF switch; Capacitors; Costs; Dielectric losses; Filters; Inductors; Micromachining; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2001. 23rd Annual Technical Digest
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-6663-8
DOI :
10.1109/GAAS.2001.964365