DocumentCode :
1864806
Title :
RF MEMS: benefits & challenges of an evolving RF switch technology
Author :
Goldsmith, C. ; Kleber, J. ; Pillans, B. ; Forehand, D. ; Malczewski, A. ; Frueh, P.
Author_Institution :
Raytheon Co., TX, USA
fYear :
2001
fDate :
21-24 Oct. 2001
Firstpage :
147
Lastpage :
148
Abstract :
RF MEMS technology is a new technology that is already finding niche applications in radar and communications systems. Its low power, high performance, and tunability enables potential cost, size, and/or weight improvements in several systems. Emphasis is no longer focused on RF performance, as that aspect is well established. Currently, efforts are underway to establish and improve the reliability of the devices. As with any maturing technology, there is much room for improvement. However, results to date show continuing improvement in lifetime and provide an argument that these devices will eventually have very long lifetimes (> 10/sup 11/ cycles).
Keywords :
micromechanical devices; switches; RF MEMS technology; RF switch; Capacitors; Costs; Dielectric losses; Filters; Inductors; Micromachining; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2001. 23rd Annual Technical Digest
Conference_Location :
Baltimore, MD, USA
ISSN :
1064-7775
Print_ISBN :
0-7803-6663-8
Type :
conf
DOI :
10.1109/GAAS.2001.964365
Filename :
964365
Link To Document :
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