High sensitivity ultrasonic transducer array for 2-D hydropohone application, using an epitaxial PZT thin film grown on γ-Al2O3/Si

Author

Kanja, Ikuo ; Otonari, Mikito ; Yogi, Takahiro ; Akai, Daisuke ; Sawada, Kazuaki ; Ishida, Makoto ; Okada, Nagaya ; Higuchi, Kazuki

Author_Institution

Dept. of EEE, Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1150

Lastpage

1153

Abstract

A ultrasonic transducer array was fabricated using an epitaxial Pb(Zr,Ti)O₃ (PZT) thin film grown on SrRuO₃/Pt/gamma-Al₂O₃/Si structures. The fabricated diaphragm transducer 2-D array with 8 times 8 elements has developed by XeF₂ gas from the topside of Si.

Keywords

thin films; ultrasonic transducer arrays; 2D hydropohone application; Al₂O₃-Si; SrRuO₃/Pt/gamma-Al₂O₃/Si structure; diaphragm transducer 2D array; epitaxial PZT thin film; epitaxial Pb(Zr,Ti)O3 thin film; high sensitivity ultrasonic transducer array; Aluminum oxide; Circuits; Fabrication; Piezoelectric films; Semiconductor thin films; Substrates; Transistors; Ultrasonic transducer arrays; Ultrasonic transducers; Ultrasonic variables measurement; γ-Al2O3; 2-D array; PZT; Si integrated; Ultrasonic transducer; epitaxial;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285934

Filename

5285934