Title :
Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly
Author :
Jang, M.W. ; Lu, M. ; Cui, T. ; Campbell, S.A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
This paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes, which were prepared by dielectrophoretic process with Layer-by-Layer self-assembly. The measured DC pull-in voltages ranged from 0.9 V to 4.8 V, depending on the length of switches. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high- performance MEMS/NEMS.
Keywords :
carbon nanotubes; electrophoresis; microswitches; nanoelectromechanical devices; nanoelectronics; MEMS switch; NEMS; SWNT membranes; aligned composite CNT membrane; dielectrophoretic self-assembly; fixed-beam switches; nanoelectronics; Biomembranes; Delay; Dielectrophoresis; Length measurement; Micromechanical devices; Microswitches; Nanoelectronics; Self-assembly; Switches; Voltage; Aligned composite SWNT Membrane; Dielectrophoretic Process; Fixed-Beam Switch; Layer-By-Layer Self-Assembly;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285936
