Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly

Author

Jang, M.W. ; Lu, M. ; Cui, T. ; Campbell, S.A.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA

fYear

2009

fDate

21-25 June 2009

Firstpage

912

Lastpage

915

Abstract

This paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes, which were prepared by dielectrophoretic process with Layer-by-Layer self-assembly. The measured DC pull-in voltages ranged from 0.9 V to 4.8 V, depending on the length of switches. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high- performance MEMS/NEMS.

Keywords

carbon nanotubes; electrophoresis; microswitches; nanoelectromechanical devices; nanoelectronics; MEMS switch; NEMS; SWNT membranes; aligned composite CNT membrane; dielectrophoretic self-assembly; fixed-beam switches; nanoelectronics; Biomembranes; Delay; Dielectrophoresis; Length measurement; Micromechanical devices; Microswitches; Nanoelectronics; Self-assembly; Switches; Voltage; Aligned composite SWNT Membrane; Dielectrophoretic Process; Fixed-Beam Switch; Layer-By-Layer Self-Assembly;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285936

Filename

5285936