Design of 1.2 GeV synchrotron light source for X-ray lithography at Samsung Heavy Industries

Author

Kim, Keeman ; Han, Bumsoo ; Joh, Kihun ; Kim, Sungmyun ; Kim, Byungmun ; Park, Heunggyu ; Park, Jongpil ; Kim, Jinsoo ; Kang, Wongu ; Kang, Kyungwoo ; Kim, Yuri ; Lee, Sangil ; Kim, Younghee

Author_Institution

Samsung Heavy Ind. Daeduk R&D Center, Daejoen, South Korea

Volume

1

fYear

1995

fDate

1-5 May 1995

Firstpage

269

Abstract

An 1.2 GeV electron storage ring being designed at Samsung Heavy Industries Daeduk R&D Center is optimized for X-ray lithography works for high density semiconductor devices and micro-machining. The lattice is a variation of a FODO arrangement with four quadrupole doublets. The circumference of 57.6 m includes four 2.1-m-long straight sections and two 3.09-m-long dispersion-free straight sections making the synchrotron a racetrack shape. Two dispersion-free straight sections are located between the doublets and reserved for diagnostics and insertion devices. The harmonic number is 96 and the corresponding RF frequency is 449.654 MHz. The critical X-ray wavelength from sixteen 1.16-m-long bending magnets is 9.55 Å and a superconducting wiggler is also included in the design considerations. The major features of the light source will be described

Keywords

electron accelerators; lithography; semiconductor technology; storage rings; 1.16 m; 1.2 GeV; 2.1 m; 3.09 m; 499.654 MHz; 9.55 A; FODO lattice; RF frequency; Samsung Heavy Industries; X-ray lithography; X-ray wavelength; electron storage ring; harmonic number; quadrupole doublets; superconducting wiggler; synchrotron light source; Design optimization; Electrons; Lattices; Light sources; Radio frequency; Semiconductor devices; Shape; Storage rings; Synchrotrons; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Particle Accelerator Conference, 1995., Proceedings of the 1995

Conference_Location

Dallas, TX

Print_ISBN

0-7803-2934-1

Type

conf

DOI

10.1109/PAC.1995.504632

Filename

504632