MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment

Author

Ducloux, O. ; Park, J.-W. ; Tiercelin, N. ; Pernod, P. ; Preobrazhensky, V. ; Hamon, M. ; Sakai, Y. ; Fujita, H.

Author_Institution

LIMMS/CNRS-IIS (UMI 2820), Univ. of Tokyo, Tokyo, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1019

Lastpage

1022

Abstract

This paper presents a novel type of remotely actuated, chemical or bio-sensor based on a MEMS resonator actuated by a multilayered (TbCo/FeCo) x25 nanostructured magnetostrictive film in liquid environment. The active film is polarized in order to induce spin reorientation transition, yielding giant sensitivity to a dynamical actuation magnetic field. Moreover, the resonator is placed at the air/liquid interface in order to increase its quality factor. Sensing results in different viscosity solutions are presented. The possibility to use such a device for the fast determination of cellular density is also demonstrated.

Keywords

Q-factor; biosensors; chemical sensors; iron compounds; micromechanical resonators; nanostructured materials; terbium compounds; thin films; MEMS resonators; TbCo-FeCo; air-liquid interface; biosensor; cellular density; chemical sensor; dynamical actuation magnetic field; liquid environment; nanostructed magnetostrictive film multilayers; quality factor; spin reorientation transition; Biosensors; Etching; Magnetic films; Magnetic materials; Magnetic multilayers; Magnetic resonance; Magnetostriction; Micromechanical devices; Optical resonators; Silicon; Biosensor; cantilever; liquid environment; magnetostriction; resonator; spin reorientation transition;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285961

Filename

5285961