Title :
Hydrophilic modification of multi-walled carbon nanotubes based neural microelectrode array
Author :
Chen, C.H. ; Su, H.C. ; Chuang, S.C. ; Yen, S.J. ; Chen, Y.C. ; Lee, Y.T. ; Yew, T.R. ; Chen, H. ; Yeh, S.R. ; Chang, Y.C. ; Yao, D.J.
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This paper reports an improved method for reducing the impedance of microelectrode array (MEA). The impedance reduction is generally required by increasing the effective surface area of electrode. We have fabricated and treated the multi-walled carbon nanotubes (MWCNTs) based MEA for neuroscience application. The effect of plasma treatment on the surface wettability of MWCNTs was examined and characterized. The H2O plasma treatment was utilized to modify the surface of MWCNTs from superhydrophobic to superhydrophilic. The treated recipe of power under 25 W for 10 sec could improve the electro-chemical and biological properties efficiently.
Keywords :
carbon nanotubes; hydrogen compounds; hydrophilicity; hydrophobicity; microelectrodes; surface treatment; wetting; H2O; hydrophilic modification; impedance reduction; multiwalled carbon nanotubes; neural microelectrode array; plasma treatment; superhydrophilic; superhydrophobic; surface wettability; Carbon nanotubes; Electrodes; Microelectrodes; Neural microtechnology; Neuroscience; Plasma applications; Plasma properties; Plasma temperature; Surface impedance; Surface treatment; Microelectrode Array; Multi Walled Carbon Nanotubes; Neuroscience;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285978