Title :
Timing analysis case studies using 1064 nm Continuous Wave laser for Fault Isolation on scan failures
Author :
Ranganathan, Gopinath ; Ravikumar, Venkat-Krishnan ; Phoa, Angeline ; Chea-Wei Teo
Author_Institution :
Device Anal. Lab., Adv. Micro Devices, Singapore, Singapore
fDate :
June 29 2015-July 2 2015
Abstract :
1320 nm Continuous Wave (CW) laser is conventionally used for Timing Analysis techniques like Laser voltage probing which has spatial resolution limitation as the technology node scales down. This paper illustrates case studies using 1064 nm CW laser for timing analysis and highlights its spatial resolution advantages for use in Fault Isolation.
Keywords :
failure analysis; fault diagnosis; laser beam applications; CW laser; continuous wave laser; fault isolation; laser voltage probing; scan failures; timing analysis techniques; wavelength 1064 nm; wavelength 1320 nm; Clocks; Failure analysis; MOS devices; Silicon; Spatial resolution; Transistors;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224320
