• DocumentCode
    1866846
  • Title

    Timing analysis case studies using 1064 nm Continuous Wave laser for Fault Isolation on scan failures

  • Author

    Ranganathan, Gopinath ; Ravikumar, Venkat-Krishnan ; Phoa, Angeline ; Chea-Wei Teo

  • Author_Institution
    Device Anal. Lab., Adv. Micro Devices, Singapore, Singapore
  • fYear
    2015
  • fDate
    June 29 2015-July 2 2015
  • Firstpage
    13
  • Lastpage
    16
  • Abstract
    1320 nm Continuous Wave (CW) laser is conventionally used for Timing Analysis techniques like Laser voltage probing which has spatial resolution limitation as the technology node scales down. This paper illustrates case studies using 1064 nm CW laser for timing analysis and highlights its spatial resolution advantages for use in Fault Isolation.
  • Keywords
    failure analysis; fault diagnosis; laser beam applications; CW laser; continuous wave laser; fault isolation; laser voltage probing; scan failures; timing analysis techniques; wavelength 1064 nm; wavelength 1320 nm; Clocks; Failure analysis; MOS devices; Silicon; Spatial resolution; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
  • Conference_Location
    Hsinchu
  • Type

    conf

  • DOI
    10.1109/IPFA.2015.7224320
  • Filename
    7224320
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1866846