Title :
Quality and reliability investigation of Ni/Sn transient liquid phase bonding technology
Author :
Tsung-Yen Tsai ; Yao-Jen Chang ; Kuan-Neng Chen
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fDate :
June 29 2015-July 2 2015
Abstract :
A submicron of Ni/Sn transient liquid phase bonding at low temperature was investigated to surmount nowadays fine-pitch Cu/Sn process challenge. After bonding process, only uniform and high-temperature stable Ni3Sn4 intermetallic compound was existed. In addition, the advantages of this scheme showed excellent electrical and reliability performance and mechanical strength.
Keywords :
alloys; bonding processes; copper; fine-pitch technology; nickel; tin; Cu-Sn; Ni-Sn; Ni3Sn4; bonding process; fine-pitch process challenge; intermetallic compound; transient liquid phase bonding technology; Bonding; Contact resistance; Liquids; Nickel; Reliability; Tin; Transient analysis;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224326