Title :
A novel analysis of oxide breakdown based on dynamic observation using ultra-high speed video capturing up to 10,000,000 frames per second
Author :
Kuroda, Rihito ; Shao, F. ; Kimoto, Daiki ; Furukawa, Kazuki ; Sugo, Hidetake ; Takeda, Takahiro ; Miyauchi, Ken ; Tochigi, Yasuhisa ; Teramoto, A. ; Sugawa, Shigetoshi
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
Dynamic visualization results of 100 nm-thick oxide breakdown are demonstrated in this work realized by the ultra-high speed video capturing with a frame rate of up to 10M frame-per-second. The correlation of the time-dependent-dielectric-breakdown failure mode and light emission mode are confirmed.
Keywords :
electric breakdown; failure analysis; integrated circuit reliability; large scale integration; video cameras; LSIs; dynamic observation; dynamic visualization; light emission mode; oxide breakdown analysis; size 100 nm; time-dependent-dielectric-breakdown failure mode; ultra-high speed video; Cameras; Capacitors; Charge carrier processes; Electric breakdown; Films; Logic gates; MOS capacitors; TDDB; high speed video camera; oxide breakdown;
Conference_Titel :
Reliability Physics Symposium, 2014 IEEE International
Conference_Location :
Waikoloa, HI
DOI :
10.1109/IRPS.2014.6860637
