Title :
Image improvement using image processing for scanning acoustic tomograph images
Author :
Sakai, Kaoru ; Kikuchi, Osamu ; Takada, Masafumi ; Sugaya, Natsuki ; Ohno, Shigeru
Author_Institution :
R&D Group., Hitachi, Ltd., Yokohama, Japan
fDate :
June 29 2015-July 2 2015
Abstract :
This paper describes an image restoration technique that improves the sharpness of an inspection image for LSI packages using a scanning acoustic tomograph(SAT). This technique performs optimal restoration, depending on the type of probe used for imaging, by estimating the intensity distribution of the ultrasonic beam at the interface of testing and by eliminating the influence. The result of an experiment shows that the contrast of SAT images is improved 1.6 times.
Keywords :
acoustic tomography; image restoration; inspection; integrated circuit packaging; integrated circuit testing; large scale integration; ultrasonic imaging; LSI packages; SAT images; image improvement; image processing; image restoration technique; inspection image; intensity distribution; optimal restoration; scanning acoustic tomograph images; ultrasonic beam; Acoustic beams; Acoustics; Deconvolution; Image restoration; Imaging; Inspection; Transducers;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224357
