Title :
Determination of iodide in clean room air by ion chromatography
Author :
JianMing Zhang ; Lei Zhu ; Zhao, S.P. ; Liu, B.H. ; Lim, Edmund ; Ee, C.K. ; Lau, D.K. ; Lam, Jeffrey
Author_Institution :
PTF FA Dept., GLOBALFOUNDRIES Singapore Pte Ltd., Singapore, Singapore
fDate :
June 29 2015-July 2 2015
Abstract :
A case study of Iodine-containing induced Cu layer corrosion was reported in the paper. The iodine was believed to be from environmental air and reacted with Cu layer to cause delamination. Ion chromatography analysis method was developed to analyze the iodide levels in the clean room air and the air after Facility Make-up Air Unit. The developed method successfully helped to locate the source of the corrosive iodide and effectively monitor clean room air quality.
Keywords :
air cleaners; air quality; chromatography; copper; corrosion; clean room air; iodine-containing induced copper layer corrosion; ion chromatography; Calibration; Carbon; Chemicals; Corrosion; Ions; Monitoring;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224361
