Quantitative analysis of the accuracy and sensitivity of strain measurements from nanobeam electron diffraction

It is difficult to determine the accuracy of NBD measurements for several reasons including, the uncertainty in the actual value of the strain in the reference patterns, uncertainty in the strain of known reference samples due to sample preparation, and uncertainty in the algorithms used measure the reflection positions. In order to quantify the accuracy and sensitivity of NBD analysis several reflection fitting algorithms have been tested using simulated diffraction patterns and experimental data from structures of known composition.