DocumentCode :
1868209
Title :
[Copyright notice]
fYear :
2015
fDate :
18-22 Jan. 2015
Firstpage :
1
Lastpage :
1
Abstract :
Presents the copyright for this conference publication.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril, Portugal
Type :
conf
DOI :
10.1109/MEMSYS.2015.7050868
Filename :
7050868
Link To Document :
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