• DocumentCode
    1868209
  • Title

    [Copyright notice]

  • fYear
    2015
  • fDate
    18-22 Jan. 2015
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Presents the copyright for this conference publication.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
  • Conference_Location
    Estoril, Portugal
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2015.7050868
  • Filename
    7050868