DocumentCode
1868209
Title
[Copyright notice]
fYear
2015
fDate
18-22 Jan. 2015
Firstpage
1
Lastpage
1
Abstract
Presents the copyright for this conference publication.
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location
Estoril, Portugal
Type
conf
DOI
10.1109/MEMSYS.2015.7050868
Filename
7050868
Link To Document