Title :
The long path from MEMS resonators to timing products
Author :
Ng, E. ; Yang, Y. ; Hong, V.A. ; Ahn, C.H. ; Heinz, D.B. ; Flader, I. ; Chen, Y. ; Everhart, C.L.M. ; Kim, B. ; Melamud, R. ; Candler, R.N. ; Hopcroft, M.A. ; Salvia, J.C. ; Yoneoka, S. ; Graham, A.B. ; Agarwal, M. ; Messana, M.W. ; Chen, K.L. ; Lee, H.K.
Author_Institution :
Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.
Keywords :
micromechanical resonators; MEMS resonators; SiTime; technological developments; Encapsulation; Micromechanical devices; Sensors; Silicon; Thermal stability; Timing;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050869
