Contaminant failure analysis: A particle library and its search engine

We demonstrate a procedure of contaminant-related failure analysis, which identifies where the contaminant sources are by looking for the matched characteristics in a contaminant library. As a result, an expandable contaminant library with over a half thousand of samples is created along with an indexing searching engine to largely reduce the time-consuming identification. With this system, we can locate the contaminant sources and further remove the root causes and improve the process ability. We demonstrate a procedure of contaminant-related failure analysis, which identifies where the contaminant sources are by looking for the matched characteristics in a contaminant library. As a result, an expandable contaminant library with half thousands of samples is created along with an indexing search engine, which could largely reduce the time-consuming identification.