Title :
Correlating SEM and SPM for nanoprobing in failure analysis
Author :
Kemmler, M. ; Rummel, A. ; Schock, K. ; Kleindiek, S.
Author_Institution :
Nanotechnik GmbH, Reutlingen, Germany
fDate :
June 29 2015-July 2 2015
Abstract :
A compact nanoprober suitable for SEM/FIB is presented. Each of the eight probes can be biased and scanned over the sample surface, allowing for the acquisition of current flow images (CI) with sub-pA resolution. The correlation of SEM and CI is used to locate leakages in 22 nm SRAM devices.
Keywords :
SRAM chips; failure analysis; focused ion beam technology; probes; scanning electron microscopy; scanning probe microscopy; FIB; SEM; SPM; SRAM devices; compact nanoprober; current flow image acquisition; failure analysis; focused ion beam; nanoprobing; scanning electron microscopes; scanning probe microscopes; size 22 nm; sub-pA resolution; Contacts; Current measurement; Integrated circuits; Logic gates; Probes; Scanning electron microscopy; Semiconductor device measurement;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224377
