Title :
Microfabricated liquid chamber utilizing solvent-drying for in-situ TEM imaging of nanoparticle self-assembly
Author :
Won Chul Lee ; Jungwon Park ; Weitz, David A. ; Takeuchi, Shoji ; Alivisatos, A. Paul
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
Abstract :
This work presents a microfabricated liquid-sample chamber for real-time TEM (Transmission Electron Microscopy) of nanoscale processes driven by liquid evaporation. Previous liquid-microchambers for TEM hold liquid samples in fully-closed (vacuum-tight) micro/nano-scale structures, thus evaporation-driven nanoscale phenomena couldn´t be studied. The present work uses intended leakage/failure in bonding and e-beam induced heating in order to generate solvent-drying during TEM imaging, and the captured real-time nanometer-scale movies visualize critical steps in the self-assembly process of 2D nanoparticle arrays including the two-step crystallization process.
Keywords :
bonding processes; crystallisation; drying; evaporation; microfabrication; nanofabrication; nanoparticles; self-assembly; transmission electron microscopy; 2D nanoparticle array; TEM hold liquid sample; bonding; crystallization process; e-beam; fully closed microscale structure; fully closed nanoscale structure; in-situ TEM imaging; leakage; liquid evaporation; liquid microchamber; microfabricated liquid sample chamber; nanoparticle self-assembly process; nanoscale process; solvent drying; transmission electron microscopy; Liquids; Motion pictures; Nanoparticles; Nanoscale devices; Real-time systems; Self-assembly;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050872
