Title :
Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems
Author :
Gaopeng Xue ; Toda, Masaya ; Ono, Takahito
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.
Keywords :
assembling; magnetic force microscopy; magnetic resonance; temperature measurement; 3D scanning stage; assembled comb-drive XYZ-microstage; bottom silicon base substrate; distance 20.4 mum; distance 25.2 mum; distance 58.5 mum; magnetic resonance force microscopy; micromanipulator; stainless steel; temperature measurement system; three-dimensional scanning stage; Silicon; Springs; Substrates; Temperature measurement; Temperature sensors; Three-dimensional displays;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050874
