Iterative learning control for voice coil motor XY motion platform

Iterative learning control (ILC) is an effective control tool to reduce systematic errors of the system that perform repetitive tasks. In this paper, based on the voice coil motor XY motion platform, we design a filter type ILC feedforward and feedback control structure to insure the robust stability and the tracking performance of the motion system. In the design of the control system, the concept like double closed loop control and zero phase error tracking control algorithm are being used. Both simulations and experiments show that with this control structure, a better dynamic and static performance is obtained, i.e., the maximum acceleration of the system up to 5g, maximum speed of 0.8m/s, after 4 times iterative learning, trajectory tracking error can be reduced to 0.003mm, High speed and high precision point to point control is realized. So ILC can be widely used in the field of motion system, especially for IC package, that repeatedly perform the same movement.