Title :
NEMS optical cross connect (OXC) driven by opticl force
Author :
Cai, H. ; Lin, J.X. ; Wu, J.H. ; Dong, B. ; Gu, Y.D. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Kwong, D.L. ; Liu, A.Q.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
This paper presents a compact silicon-photonic based optical cross connect (OXC) driven by the optical gradient force. Each switch element consists of a waveguide-crossing-coupled micro-ring resonator and a suspended arc. The device is fabricated with a standard CMOS compatible process using deep-UV 248-nm lithography with a double-etch technique. A switching time of 0.24 μs is experimentally demonstrated. The proposed switch topology of the interconnections has potentials of employing a single wavelength channel or multiple wavelength channels, and provides channel selection from sets of input fibers and sets of output fibers.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; micromechanical resonators; nanoelectromechanical devices; optical interconnections; optical switches; optical waveguides; silicon; ultraviolet lithography; NEMS optical cross connect; Si; compact silicon-photonic based optical cross connect; deep-UV lithography; double etch technique; interconnections; optical gradient force; standard CMOS compatible process; suspended arc; switch topology; switching time; time 0.24 mus; waveguide-crossing-coupled microring resonator; wavelength 248 nm; Force; Optical fibers; Optical ring resonators; Optical switches;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050885
