Title :
Fabrication and characterization of a new varifocal liquid lens with embedded PZT actuators for high optical performances
Author :
Nicolas, Stephane ; Allain, Marjolaine ; Bridoux, Claudine ; Fanget, Stephane ; Lesecq, Suzanne ; Zarudniev, Mykhailo ; Bolis, Sebastien ; Pouydebasque, Arnaud ; Jacquet, Fabrice
Author_Institution :
LETI, CEA, Grenoble, France
Abstract :
This paper reports the fabrication and characterizations of a compact varifocal lens with an embedded PZT actuator. Optical aperture is typically up to 3 mm diameter with a total component thickness down to 400μm. High power efficiency (lower than 0.1 μW), high speed response time (down to 1 ms), high electro-optical performances (10 diopters optical power variation at 10V) and good optical quality (wavefront error lower than 50 nm) is reported through this paper.
Keywords :
actuators; integrated optics; lead compounds; lenses; optical fabrication; zirconium compounds; PZT; diopters optical power variation; embedded PZT actuators; high electro-optical performances; high optical performances; high power efficiency; high speed response time; optical aperture; optical quality; varifocal liquid lens fabrication; wavefront error; Actuators; Adaptive optics; Lenses; Liquids; Optical device fabrication; Optical imaging; Optical sensors;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050887
