Title :
Second harmonic generation of a CO/sub 2/ laser using a thick quasi-phase-matched GaAs layer grown by hybride vapor phase epitaxy
Author :
Becouarn, L. ; Gerard, B. ; Brevignon, M. ; Lehoux, J. ; Gourdel, Y. ; Lallier, E.
Author_Institution :
Central Res. Lab., Thomson-CSF, Orsay, France
Abstract :
Summary form only given. GaAs is a very interesting material for mid IR nonlinear frequency conversion. To obtain shorter periods several techniques are based on patterning a template substrate thanks to photolithography have been proposed. After having prepared the template a growth is made on it with organometallic chemical vapor deposition (OMCVD) or molecular beam epitaxy (MBE). However these techniques have a low deposition rate and waveguide structures must be used. The purpose of this contribution is to study and to characterize the growth of a thick layer of GaAs on a pattern of antiphase domains (APDs) for future bulk quasi-phase matched nonlinear applications.
Keywords :
MOCVD; gallium arsenide; gas lasers; infrared sources; laser beams; molecular beam epitaxial growth; optical films; optical harmonic generation; optical phase matching; semiconductor growth; CO/sub 2/; CO/sub 2/ laser; GaAs; MBE; OMCVD; antiphase domains pattern; bulk quasi-phase matched nonlinear applications; hybride vapor phase epitaxy; low deposition rate; mid IR nonlinear frequency conversion; molecular beam epitaxy; organometallic chemical vapor deposition; patterning; photolithography; second harmonic generation; template substrate; thick layer; thick quasi-phase-matched GaAs layer; waveguide structures; Chemicals; Epitaxial growth; Etching; Frequency conversion; Gallium arsenide; Laser beam cutting; Laser theory; Molecular beam epitaxial growth; Substrates; Thermal conductivity;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834202