Title :
Reliability investigation of flexible graphene-based actuator
Author :
Liu, S.B. ; Wang, W. ; Yuan, T.Y. ; Zhang, Y.Y. ; Zhong, N. ; Qi, R.J. ; Huang, R. ; Zhang, J. ; Wu, X.
Author_Institution :
Dept. of Electr. Eng., East China Normal Univ., Shanghai, China
fDate :
June 29 2015-July 2 2015
Abstract :
Graphene is a typical two-dimensional material which has fascinating electrical, mechanical, and optical properties. In particular, graphene-based smart MEMS/NEMS devices can automatically respond to external electric stimulation and convert to mechanical movement. Actuator is one of the most potential applications of graphene-based MEMS. However, its reliability investigation has rarely been reported. Here we report the failure mechanism of a bimorph actuator fabricated by reduced graphene (RGO) and graphene oxide (GO). Our findings pave a way to the fundamental understanding of reliability issues on graphene-based actuators.
Keywords :
actuators; graphene devices; microactuators; reliability; MEMS devices; NEMS devices; bimorph actuator; external electric stimulation; flexible graphene-based actuator; graphene oxide; reduced graphene; reliability investigation; Actuators; Graphene; Micromechanical devices; Optical filters; Reliability; Resistance; Threshold voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the
Conference_Location :
Hsinchu
DOI :
10.1109/IPFA.2015.7224413