Measurement of surface acoustic waves propagation using a piezoresistive cantilever array

This paper presents an approach to measure the propagation of surface acoustic waves (SAW), using a piezoresistive cantilever array. SAW was measured by cantilevers designed at the liquid-substrate interaction area by utilizing the structure of liquid-cantilever-air, which is highly sensitive and is able to measure acoustic wave at high frequency. Experiment results demonstrate that the measurable range was confirmed from 0.1 MHz up to 100 MHz. Phase shift and propagation decay were also observed along the propagating direction of SAW.