Title :
When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency
Author :
Houmadi, S. ; Legrand, B. ; Salvetat, J.P. ; Walter, B. ; Mairiaux, E. ; Aime, J.P. ; Ducatteau, D. ; Merzeau, P. ; Buisson, L. ; Elezgaray, J. ; Theron, D. ; Faucher, M.
Author_Institution :
CBMN, Pessac, France
Abstract :
We show that the capacitive transduction of a MEMS device using a setup based on a microwave detection scheme achieves the measurement of the thermomechanical noise spectrum of a high-frequency (>10 MHz) high-stiffness (>105 N/m) resonator, reaching the outstanding displacement resolution of 1 fm/√Hz. This result paves the way for vibrating sensors with exquisite force resolution in the fN/vHz range, enabling large-bandwidth measurements of mechanical interactions at small scale and rheology of fluids at very high frequency. An example of application is given and concerns atomic force microscopy images of biomolecular assemblies.
Keywords :
atomic force microscopy; capacitive sensors; capacitive transducers; force sensors; micromechanical resonators; microsensors; microwave measurement; vibration measurement; MEMS device; MEMS resonators; atomic force microscopy; biomolecular assemblies; capacitive transduction; femtonewton force sensors; fluid rheology; large-bandwidth measurements; microwave detection; thermomechanical noise spectrum; vibrating sensors; DNA; Force; Micromechanical devices; Microscopy; Microwave oscillators; Resonant frequency; Thermomechanical processes;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050908
